Ultra-pure heating systems are used in semiconductor-related industry heating applications. The heaters are made of high purity quartz material and the system piping is PFA for deionized water and less corrosive process chemicals. The heating system is professionally controlled by the advanced PID technology and the logic operation of the PLC, and the temperature control class is ± 0.5 ° C, and the products are suitable for semiconductor, solar, MEMS manufacturing and other industries requiring strict purity standards.